| Diameter | 2" | 3" | 4" | 5" | 6" | 8" |
| Material | Glass | |||||
| Grade | BF33, B270, Sodalime, Pyrex, Borofloat, Borosilicate ,Corning eagle XG, BK7, and etc. | |||||
| Thickness (um) | 279 | 280 | 525 | 625 | 675 | 725 |
| Surface Finished | DSP/SSP | |||||
| TTV (um) | <8 | <10 | <10 | <10 | <15 | <20 |
| Bow/Warp (um) | <30 | <30 | <40 | <40 | <60 | <60 |
| Top Side Ra (nm) | <1 | |||||
| S/D (um) | 40/20 | |||||
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